Electron-beam lithography system
For nanometer-scale fabrication
Fabrication Facilities
Photolithography and evapolation systems
For micrometer-scale fabrication
Scanning electron microscope
For checking devices fabricated
Low Temperature Facilities
Helium reliquefier, 3He refrigerator, Dilution refrigerator
ASEM Measurement
Innovation Garage
We aim for social implementation in the medical field.
Biomedical sensing system
A measurement system to evaluate biological tissues such as bones, ligaments, and organs.
Industrial sensing system
Practical application in industrial non-destructive testing.